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Assessing Ohmic Contacts

Published online by Cambridge University Press:  25 February 2011

H Barry Harrison and
Geoffery K Reeves
H Barry Harrison
Affiliation:
School of Microelectronic Engineering, Griffith University, Brisbane 4111, Australia
Geoffery K Reeves
Affiliation:
MMTC-RMIT, Melbourne 3000, Australia
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Abstract

This paper reviews specific contact resistivity pc values obtained theoretically and experimently for a range of semiconducting materials. Techniques of obtaining pc values in terms of measurement, accuracy and reproducibility are then considered and matched to the semiconducting materials previously covered.

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References

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