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The Berkeley Atomic Resolution Microscope – an Update

Published online by Cambridge University Press:  21 February 2011

C. J. D. Hetherington,
E. C. Nelson,
K. H. Westmacott,
R. Gronsky and
G. Thomas
C. J. D. Hetherington
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley Laboratory, University of California, 1 Cyclotron Rd., Berkeley, CA 94720.
E. C. Nelson
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley Laboratory, University of California, 1 Cyclotron Rd., Berkeley, CA 94720.
K. H. Westmacott
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley Laboratory, University of California, 1 Cyclotron Rd., Berkeley, CA 94720.
R. Gronsky
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley Laboratory, University of California, 1 Cyclotron Rd., Berkeley, CA 94720.
G. Thomas
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley Laboratory, University of California, 1 Cyclotron Rd., Berkeley, CA 94720.
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Abstract

Recent modifications to the JEOL ARM-1000 microscope have markedly enhanced its performance. The point resolution limit at 1000kV is confirmed by optical diffractograms down to 1.7Å and there are firm indications of contrast transfer down to 1.4Å. The unique tilting capability of the ARM, ±40° biaxial tilt over the 800kV to 1000kV range, is preserved at this resolution. This paper presents the measured imaging parameters and results of resolution tests.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989, 277
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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