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Beryllium-Based Multilayer Structures

Published online by Cambridge University Press:  15 February 2011

D. G. Stearns,
K. M. Skulina,
M. Wall,
C. S. Alford,
R. M. Bionta,
D. M. Makowiecki,
E. M. Gullikson,
R. Soufli,
J. B. Kortright and
J. H. Underwood
D. G. Stearns
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
K. M. Skulina
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
M. Wall
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
C. S. Alford
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
R. M. Bionta
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
D. M. Makowiecki
Affiliation:
Lawrence Livermore National Laboratory, P.O. Box 808, Livermore CA 94551
E. M. Gullikson
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
R. Soufli
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
J. B. Kortright
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
J. H. Underwood
Affiliation:
Center of X-ray Optics, Lawrence Berkeley Laboratory, CA 94720
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Abstract

Multilayer (ML) structures composed of Mo-Be, Ru-Be and Rh-Be with bilayer periods of - 6 nm have been grown using dc magnetron sputter deposition. The ML microstructure has been characterized using x-ray diffraction and high-resolution transmission electron microscopy, and the normal incidence reflectivity has been measured at soft x-ray wavelengths.

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References

REFERENCES

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