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Bi-Directional Motion Achieved with a Surface Micromachined Electrothermal MEMS Microengine

Published online by Cambridge University Press:  01 February 2011

Edward Kolesar,
Alfred Jayachandran,
William Odom,
Matthew Ruff,
Justin McAllister,
Simon Ko,
Jeffrey Howard,
Peter Allen,
Richard Wilks and
Josh Wilken
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Edward Kolesar
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Alfred Jayachandran
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
William Odom
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Matthew Ruff
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Justin McAllister
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Simon Ko
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Jeffrey Howard
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Peter Allen
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Richard Wilks
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Josh Wilken
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Noah Boydston
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
Jorge Bosch
Affiliation:
Texas Christian University, Department of Engineering, Fort Worth, TX 76129, U.S.A.
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Abstract

This research is focused on the design and experimental characterization of an electrothermal microengine that is capable of bi-directional motion. The microengine has been operated to control the position a linear shuttle and rotate a set of gears.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 785: Symposium D – Materials and Devices for Smart Systems , 2003, D11.7
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

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