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Carbon-based Materials as Key-enabler for “More Than Moore”

Published online by Cambridge University Press:  03 March 2011

Franz Kreupl
Franz Kreupl*
Affiliation:
SanDisk Corporation, 601 McCarthy Boulevard, Milpitas, CA 95035, USA
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Abstract

Carbon-based materials like nanotubes and graphene are heavily investigated as future transistor devices and in interconnect applications. While much of the interest has been devoted to the device aspects in competition to conventional transistors, the paper here will focus on some less known applications of pyrolytically deposited carbon. Proposed and demonstrated are applications in capacitors, gate materials, through-silicon vias, novel non-volatile memories, carbon-silicon Schottky diodes and sensors.

Keywords

Csemiconductingmetallic conductor

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1303: Symposium Y – Nanomaterials Integration for Electronics, Energy and Sensing , 2011, mrsf10-1303-y02-01-b2-01
Copyright
Copyright © Materials Research Society 2011

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References

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