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Characterization of Sub-Surface Structures by Double Crystal X-Ray Diffraction

Published online by Cambridge University Press:  26 February 2011

D.K. Bowen,
M.J. Hill and
B.K. Tanner
D.K. Bowen
Affiliation:
Dept. of Engineering, University of Warwick, Coventry CV4 7AL, England.
M.J. Hill
Affiliation:
Dept. of Physics, University of Durham, South Road, Durham DH1 3LE, England.
B.K. Tanner
Affiliation:
Dept. of Physics, University of Durham, South Road, Durham DH1 3LE, England.
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Abstract

The application of double crystal X-ray diffractometry and computer simulation to the characterization of lattice parameter variations through the thickness of heteroepitaxial layers is reviewed. The sensitivity is demonstrated in studies of graded layers grown by vapour phase epitaxy. Capping layers significantly affect rocking curves from superlattice structures. The use of glancing angle diffraction to characterize thin, low period multilayers is examined.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 82: Symposium I – Characterization of Defects in Materials , 1986, 447
Copyright
Copyright © Materials Research Society 1987

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References

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