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Chemical Solution Deposited BaTi03 AND SrTi03 Thin Films With Columnar Microstructure

Published online by Cambridge University Press:  15 February 2011

S. Hoffmann,
U. Hasenkox,
R. Waser,
C. L. Jia and
K. Urban
S. Hoffmann
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen, University of Technology, 52056 Aachen, Germany
U. Hasenkox
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen, University of Technology, 52056 Aachen, Germany
R. Waser
Affiliation:
Institut für Werkstoffe der Elektrotechnik, RWTH Aachen, University of Technology, 52056 Aachen, Germany
C. L. Jia
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
K. Urban
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
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Abstract

We show that CSD processing can be optimized in order to achieve columnar structured BaTiO3 and SrTiO3 thin films at elevated temperatures. In addition to these, columnar grain growth was also obtained for films of the solid solution (Ba0.7Sr0.3)TiO3 By controlling the film formation process, polycrystalline and columnar grained thin films were grown on Pt coated Si substrates at temperatures between 750° and 800°. The films were analyzed by glancing incidence X-ray diffraction and scanning electron microscopy. Detailed analysis on the thin films’ microstructure was performed by means of transmission electron microscopy. Based on these data, the film formation process is discussed with respect to process control and precursor chemistry. Differences in the crystallization process of BaTiO3 thin films compared to SrTiO3 films are pointed out.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 474: Symposium L – Epitaxial Oxide Thin Films III , 1997, 9
Copyright
Copyright © Materials Research Society 1997

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References

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