Hostname: page-component-7b7567c8c-2n9c9 Total loading time: 0 Render date: 2026-11-15T16:00:58.413Z Has data issue: false hasContentIssue false
  • English
  • Français

A Combinatorial Approach to TCO Synthesis and Characterization

Published online by Cambridge University Press:  21 March 2011

John Perkins,
Dennis Readey,
Jeff Alleman,
Joe del Cueto,
Xiaonan Li,
Tim Coutts,
Renaud Stauber,
Chris Duncan,
David Young and
Phil Parilla
...Show all authors
John Perkins
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Dennis Readey
Affiliation:
Colorado School of Mines, Golden, CO, 80401, U.S.A
Jeff Alleman
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Joe del Cueto
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Xiaonan Li
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Tim Coutts
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Renaud Stauber
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Chris Duncan
Affiliation:
Colorado School of Mines, Golden, CO, 80401, U.S.A
David Young
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Phil Parilla
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Brian Keyes
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Lynn Gedvilas
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Davor Balzar
Affiliation:
National Institute of Standards and Technology, Boulder, CO 80303, U.S.A
Qi Wang
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
David Ginley
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Get access

Abstract

We have developed the deposition, characterization and analysis tools necessary for a combinatorial approach to thin film metal oxides, with a special focus on transparent conducting oxides (TCOs). We are presently depositing compositionally graded libraries using mutli-target sputtering and CVD. The initial collection of characterization tools includes UV/VIS/NIR transmission/reflection, FTIR reflectance, Raman scattering, 4-point conductivity, thickness, xray diffraction and electron microprobe. In addition to allowing for a more complete empirical optimization of TCO properties, we expect to develop an improved basic understanding of TCOs, especially in the area of p-type TCOs. This paper provides an overview of our current combinatorial material science program as applied specifically to TCOs.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001, F1.6
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Ginley, D.S. and Bright, C., MRS Bulletin 25, 15 (2000).Google Scholar
2. Gordon, R.G., MRS Bulletin 25, 52 (2000).Google Scholar
3. Coutts, T.J., Young, D.L. and Li, X.N., MRS Proc. 623, 199 (2000). F1.6.11Google Scholar
4. Ohta, H., Kawamura, K., Orita, M., Hirano, M., Sarukura, N. and Hosono, H., Appl. Phys. Lett. 77, 475 (2000).Google Scholar
5. Ohta, H., Kawamura, K., Orita, M., Sarukura, N., Hirano, M. and Hosono, H., Electronics Letters 36, 984 (2000).Google Scholar
6. Coutts, T.J., Young, D.L. and Li, X.N., MRS Bulletin 25, 58 (2000).Google Scholar
7. Coutts, T.J., Young, D.L., Li, X., Mulligan, W.P. and Wu, X., J. Vac. Sci. Technol. A 18, 2646 (2000).Google Scholar
8. Minami, T., Sohohara, H., Kakumu, T. and Takata, S., Japanese Journal of Applied Physics Part 2-Letters 34, L971 (1995).Google Scholar
9. Phillips, J.M., Cava, R.J., Thomas, G.A., Carter, S.A., Kwo, J., Siegrist, T., Krajewski, J.J., Marshall, J.H., Peck, W.F. Jr and Rapkine, D.H., Appl. Phys. Lett. 67, 2246 (1995).Google Scholar
10. Palmer, G.B., Poeppelmeier, K.R. and Mason, T.O., Chem. Mater. 9, 3121 (1997).Google Scholar
11. Minami, T., MRS Bulletin 25, 38 (2000).Google Scholar
12. Yan, M., Lane, M., Kannewurf, C.R. and Chang, R.P.H., Appl. Phys. Lett. 78, 2342 (2001).Google Scholar
13. Freeman, A.J., Poeppelmeier, K.R., Mason, T.O., Chang, R.P.H. and Marks, T.J., MRS Bulletin 25, 45 (2000).Google Scholar
14. Kawazoe, H., Yanagi, H., Ueda, K. and Hosono, H., MRS Bulletin 25, 28 (2000).Google Scholar
15. Kawazoe, H., Yasukawa, M., Hyodo, H., Kurita, M., Yanagi, H. and Hosono, H., Nature 389, 939 (1997).Google Scholar
16. Stauber, R.E., Perkins, J.D., Parilla, P.A. and Ginley, D.S., Electrochemical and Solid State Letters 2, 654 (1999).Google Scholar
17. Yanagi, H., Inoue, S., Ueda, K., Kawazoe, H., Hosono, H. and Hamada, N., Journal of Applied Physics 88, 4159 (2000).Google Scholar
18. Ueda, K., Hase, T., Yanagi, H., Kawazoe, H., Hosono, H., Ohta, H., Orita, M. and Hirano, M., Journal of Applied Physics 89, 1790 (2001).Google Scholar
19. Kudo, A., Yanagi, H., Hosono, H. and Kawazoe, H., Appl. Phys. Lett. 73, 220 (1998).Google Scholar
20. Yanagi, H., Hase, T., Ibuki, S., Ueda, K. and Hosono, H., Appl. Phys. Lett. 78, 1583 (2001).Google Scholar
21. Otabe, T., Ueda, K., Kudoh, A., Hosono, H. and Kawazoe, H., Appl. Phys. Lett. 72, 1036 (1998).Google Scholar
22. Ibuki, S., Yanagi, H., Ueda, K., Kawazoe, H. and Hosono, H., Journal of Applied Physics 88, 3067 (2000).Google Scholar
23. Thomas, G., Nature 389, 907 (1997).Google Scholar
24. Yamamoto, T. and Katayama-Yoshida, H., Jpn. J. Appl. Phys. 38, L166 (1999).Google Scholar
25. Joseph, M., Tabata, H. and Kawai, T., Japanese Journal of Applied Physics Part 2-Letters 38, L1205 (1999).Google Scholar
26. Palmer, G.B., Poeppelmeier, K.R. and Mason, T.O., Journal of Solid State Chemistry 134, 192–197 (1997).Google Scholar