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Composite BST/MgO thin films for microwave tunable devices

Published online by Cambridge University Press:  18 March 2011

T. V. Rivkin,
J. D. Perkins,
P. A. Parilla,
D. S. Ginley,
C. M. Carlson,
L. C. Sengupta,
L. Chiu,
X. Zhang,
Y. Zhu and
S. Sengupta
T. V. Rivkin
Affiliation:
National Renewable Energy Laboratory, Golden, CO
J. D. Perkins
Affiliation:
National Renewable Energy Laboratory, Golden, CO
P. A. Parilla
Affiliation:
National Renewable Energy Laboratory, Golden, CO
D. S. Ginley
Affiliation:
National Renewable Energy Laboratory, Golden, CO
C. M. Carlson
Affiliation:
Micron Technology, Inc., Boise, ID 83707-0006
L. C. Sengupta
Affiliation:
Paratek Microwave, Inc., Columbia, MD
L. Chiu
Affiliation:
Paratek Microwave, Inc., Columbia, MD
X. Zhang
Affiliation:
Paratek Microwave, Inc., Columbia, MD
Y. Zhu
Affiliation:
Paratek Microwave, Inc., Columbia, MD
S. Sengupta
Affiliation:
Paratek Microwave, Inc., Columbia, MD
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Abstract

Composite thin films of 60 wt% Ba0.6Sr0.4TiO3 and 40 wt% MgO were produced by Pulsed Laser Deposition. The biaxial texture of the BST component on the MgO substrate has been established with XRD. All as-deposited films had an enlarged BST out-of-plane lattice parameter. A more relaxed lattice constant as well as higher degree of texture has been obtained in the films deposited at higher temperature and lower deposition rate. Post-deposition annealing in flowing oxygen results in a further relaxation and alignment of the BST lattice. The as-deposited films were not tunable at room temperature. The greatest dielectric tuning was achieved in films annealed at 1200 °C. The observed difference in tunability for the films annealed at different temperatures may result from a spatial redistribution of BST material on the substrate surface during annealing.

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References

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