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The Composition Dependence of the Interdiffusivity in Artificial Amorphous Si/Ge Multilayers

Published online by Cambridge University Press:  26 February 2011

S. M. Prokes and
F. Spaepen
S. M. Prokes
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
F. Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
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Abstract

The interdirfusivity in artificial amorphous Si/Ge multilayers is found to be strongly dependent on the average composition of the films. The interdirfusivity of films with different average composition was determined from the decay of the first X-ray satellite. The nonlinear diffusion resulting from the composition dependence was observed by the evolution of the higher-order satellites.

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References

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