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Computational Modeling of Direct Print Microlithography

Published online by Cambridge University Press:  10 February 2011

A. A. Darhuber,
S. M. Miller,
S. M. Troian and
S. Wagner
A. A. Darhuber
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
S. M. Miller
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
S. M. Troian
Affiliation:
Interfacial Science Laboratory, Dept. of Chemical Engineering, Princeton University
S. Wagner
Affiliation:
Dept. of Electrical Engineering, Princeton University, Princeton, New Jersey 08544, USA
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Abstract

Using a combination of experiment and simulations, we have studied the equilibrium shapes of liquid microstructures on flat but chemically heterogeneous substrates. The surface patterns, which define regions of different surface energy, induce deformations of the liquid-solid contact line, which in turn can either promote or impede capillary break-up and bulge formation. We study numerically the influence of the adhesion energies on the hydrophilic and hydrophobic surface areas, the pattern geometry and the deposited fluid volume on the liquid surface profiles

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References

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