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Computing Thin Film Mechanical Properties with the Oliver and Pharr Method

Published online by Cambridge University Press:  10 February 2011

P. J. Wolff,
B. N. Lucas and
E. G. Herbert
P. J. Wolff
Affiliation:
MTS Nano Instruments Innovation Center, Oak Ridge, TN 37830, paul.wolff@mts.com
B. N. Lucas
Affiliation:
MTS Nano Instruments Innovation Center, Oak Ridge, TN 37830, paul.wolff@mts.com
E. G. Herbert
Affiliation:
MTS Nano Instruments Innovation Center, Oak Ridge, TN 37830, paul.wolff@mts.com
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Abstract

A commonly used technique to compute mechanical properties from indentation tests is the Oliver and Pharr method. Using dimensional analysis and finite element modeling, this paper investigates errors when the Oliver and Pharr method is used to compute thin film properties.

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References

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