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Determining Stress-strain Curves for Thin Films by Experimental/Computational Nanoindentation

Published online by Cambridge University Press:  01 February 2011

Baik-Woo Lee,
Yeol Choi,
Yun-Hee Lee,
Ju-Young Kim and
Dongil Kwon
Baik-Woo Lee
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–744, Korea
Yeol Choi
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–744, Korea
Yun-Hee Lee
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–744, Korea
Ju-Young Kim
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–744, Korea
Dongil Kwon
Affiliation:
School of Materials Science and Engineering, Seoul National University, Seoul 151–744, Korea
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Abstract

The nanoindentation technique has great promise in evaluating mechanical properties such as nanohardness and elastic modulus at micrometer or nanometer scales, since sample preparation and testing procedures are very easy. However, the nanohardness and elastic modulus cannot be directly related to basic material flow properties. Here a novel and simple experimental/computational method is proposed to extract stress-strain curves based on finite-element modeling (FEM) of nanoindentation. This method was verified for bulk Al by comparing the stress-strain curves extracted with those obtained from tensile testing, and was applied to Al thin films (0.5 μm and 1 μm) deposited on a Si substrate.

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References

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