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Development of Polyimide-based Flexible Tactile Sensing Skin

Published online by Cambridge University Press:  11 February 2011

Jonathan Engel ,
Jack Chen ,
Chang Liu ,
Bruce R. Flachsbart ,
John C. Selby  and
Mark A. Shannon
Jonathan Engel
Affiliation:
Micro and Nanotechnology Laboratory
Jack Chen
Affiliation:
Micro and Nanotechnology Laboratory
Chang Liu
Affiliation:
Micro and Nanotechnology Laboratory
Bruce R. Flachsbart
Affiliation:
Micro-Miniature Systems Laboratory, University of Illinois at Urbana-Champaign, 208 N. Wright St., Urbana, IL 61801 USA
John C. Selby
Affiliation:
Micro-Miniature Systems Laboratory, University of Illinois at Urbana-Champaign, 208 N. Wright St., Urbana, IL 61801 USA
Mark A. Shannon
Affiliation:
Micro-Miniature Systems Laboratory, University of Illinois at Urbana-Champaign, 208 N. Wright St., Urbana, IL 61801 USA
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Abstract

We present a novel microfabrication process for realizing a new type of flexible sensory “smart skin”. In this work, we focus on demonstration of a skin containing a two dimensional array of tactile sensors using polyimide and metal strain gauges. A novel polymer microfabrication approach coupled with surface release methods is demonstrated. The process yields flexible sensory skins in a low cost, efficient manner. Experimental characterization of the devices is also presented. The demonstrated sensors use metal-film strain gauges in a multiplexed two-dimensional array of tactile pixels (taxels) embedded in a polyimide thin film membrane to detect force distribution on the flexible skin. The arrays have been used to image force distributions and could be used with slip-detection friction measurement for robotic gripping application.

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References

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