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Diagnostic Techniques for PACVD Systems for Depositing Protective Coatings

Published online by Cambridge University Press:  22 February 2011

Ward C. Roman,
John H. Stufflebeam and
Alan C. Eckbreth
Ward C. Roman
Affiliation:
United Technologies Research Center, Silver Lane, East Hartford, CT 06108
John H. Stufflebeam
Affiliation:
United Technologies Research Center, Silver Lane, East Hartford, CT 06108
Alan C. Eckbreth
Affiliation:
United Technologies Research Center, Silver Lane, East Hartford, CT 06108
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Abstract

PACVD techniques for depositing protective coatings are an emerging field in plasma processing technology. Technology transfer is limited by a lack of understanding of the basic mechanisms involved in the gas phase plasma chemistry. The aspects of plasma species concentration and distribution and plasma gas temperature are fragmentary and unclear. Laser diagnostic techniques represent a critical starting point for providing some of this needed information. The techniques are in-situ, nonintrusive, and give excellent spatial and temporal resolution. Numerous diagnostic techniques for detailed coating characterization are available, but a correlation of the PACVD parameters with some of the key coating properties is required. Thus, a predictive capability that is lacking in the present science base can be established together with important phenomenological aspects needed for efficient deposition of high quality protective coatings. As the mechanisms become better understood, use of remote sensors and A.I may then be introduced. This paper will review selected diagnostic techniques available for characterizing these nonequilibrium reactive plasmas and the coatings.

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