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The Effect of Hydrogen Content on Ion Beam Mixing

Published online by Cambridge University Press:  25 February 2011

R. E. Wistrom
Affiliation:
Department of Materials Science and Engineering, Bard Hall
P. Børgesen
Affiliation:
Department of Materials Science and Engineering, Bard Hall
H. H. Johnson
Affiliation:
Department of Materials Science and Engineering, Bard Hall
D. A. Lilienfeld
Affiliation:
National Nanofabrication Facility, Cornell University, Ithaca, NY 14853
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Abstract

A qualitative study of ion beam mixing of multilayers has shown that the presence of hydrogen in the sample slows mixing considerably for Fe/Ti, and slightly for Ni/Ti. We have quantified this effect and extended the study to four more systems (Co/Ti, Pd/Ti, Ti/Cu, and Ti/Al) and to lower temperatures. The degree to which H charging reduced the mixing rate varied substantially with multilayer system. H was lost during mixing. H was lost fastest from those films for which the H effect was the smallest. Our data are consistent with a model that relates mixing inhibition to H-vacancy binding energy in the non-Ti component.

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