Hostname: page-component-7b7567c8c-fvjsw Total loading time: 0 Render date: 2026-11-15T22:43:00.661Z Has data issue: false hasContentIssue false
  • English
  • Français

Flexible surface acoustic wave devices and its applications in microfluidics

Published online by Cambridge University Press:  09 January 2014

Jian Zhou,
Xingli He,
Wenbo Wang,
Nana Hu,
Hao Jin,
Y. Xu,
Shurong Dong,
Demiao Wang,
Y.Q. Fu and
J. K. Luo
Jian Zhou
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, ChinaThin Film Centre, University of West Scotland, Paisley, PA1 2BE, UK
Xingli He
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Wenbo Wang
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Nana Hu
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Hao Jin
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Y. Xu
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Shurong Dong
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Demiao Wang
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, China
Y.Q. Fu
Affiliation:
Thin Film Centre, University of West Scotland, Paisley, PA1 2BE, UK
J. K. Luo*
Affiliation:
Dept. Info. Sci. & Electron. Eng., and Cyrus Tang Center for Sensor Mater. & Appl., Zhejiang University, Hangzhou 310027, ChinaInst. of Renew. Energ.&Environ. Tech. Bolton University, Deane Road, Bolton BL3 5AB, U.K
*
*Corresponding authors e-mails: J.Luo@bolton.ac.uk
Get access

Abstract:

Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.

Keywords

acousticfilmpiezoelectric

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

Rogers, J. A., Someya, T., Huang, Y.G., Science 2010, 327, 1603.CrossRefGoogle Scholar
Park, S. I., Xiong, Y. J., Kim, R. H., Elvikis, P., Meitl, M., Kim, D. H., Wu, J., Yoon, J., Yu, C. J., Liu, Z. J., Huang, Y. G., Hwang, K., Ferreira, P., Li, X. L., Choquette, K., Rogers, J. A., Science 2009, 325, 977.CrossRefGoogle Scholar
Ko, H. C., Stoykovich, M. P., Song, J. Z., Malyarchuk, V., Choi, W. M., Yu, C. J., Geddes, J. B., Xiao, J. L., Wang, S. D., Huang, Y. G., Rogers, J. A., Nature 2008, 454, 748.CrossRefGoogle Scholar
Kim, S., Jeong, H. Y., Kim, S. K., Choi, S.-Y., Lee, K. J., Nano Lett. 2011, 11, 5438.CrossRefGoogle Scholar
Liu, B., Zhang, J., Wang, X., Chen, G., Chen, D., Zhou, C., Shen, G., Nano Lett. 2012, 12, 3005.CrossRefGoogle Scholar
Sire, C., Ardiaca, F., Lepilliet, S., Seo, J.-W. T., Hersam, M. C., Dambrine, G., Happy, H., Derycke, V., Nano Lett. 2012, 12, 1184.CrossRefGoogle Scholar
Sun, L., Qin, G. X., Huang, H., Zhou, H., Behdad, N., Zhou, W. D., Ma, Z. Q., Appl. Phys. Lett. 2010, 96, 013509.CrossRefGoogle Scholar
Xiao, S. Y., Che, L. F., Li, X. X., Wang, Y. L., Microelectron. Eng. 2008, 85, 452.CrossRefGoogle Scholar
Lemke, T., Biancuzzi, G., Feth, H., Huber, J., Frank Goldschmidtböing, F., Woias, P., Sens. Actuator A-Phys. 2011, 168, 213.CrossRefGoogle Scholar
Wright, R., Hakemi, G., Kirby, P., Microelectron Eng. 2011, 88, 1006.CrossRefGoogle Scholar
Akiyama, M., Morofuji, Y., Kamohara, T., Nishikubo, K., Tsubai, M., Fukuda, O., Ueno, N., J. Appl. Phys. 2006, 100, 114318.CrossRefGoogle Scholar
Geiger, E. J., Pisano, A. P., Svec, F. J., Microelectromechanical Syst. 2010, 19, 944.CrossRefGoogle Scholar
Fu, Y. Q., Luo, J. K., Du, X. Y., Flewitt, A. J., Li, Y., Markx, G. H., Walton, A. J., Milne, W. I., Sens. Actuator B-Chem. 2010, 143, 606.CrossRefGoogle Scholar
Du, X.Y., Fu, Y. Q., Tan, S. C., Luo, J. K., Flewitt, A. J., Milne, W. I., Lee, D. S., Park, N. M., Park, J., Choi, Y. J., Appl. Phys. Lett. 2008, 93, 094105.CrossRefGoogle Scholar
Fu, Y.Q., Garcia-Gancedo, L., Pang, H. F., Porro, S., Gu, Y. W., Luo, J. K., Zu, X. T., Placido, F., Wilson, J. I.B., Flewitt, A. J., Biomicrofluidics 2012, 6, 024105.CrossRefGoogle Scholar
Luo, J. K., Fu, Y. Q., Ashley, G., Milne, W. I., Adv. Sci. Technol. 2011, 67, 49.CrossRefGoogle Scholar
Lim, W. T., Son, B. K., Kang, D. H., Lee, C. H., Thin Solid Films 2001, 382, 56.CrossRefGoogle Scholar
Ievtushenko, A. I., Karpyna, V. A., Lazorenko, V. I., Lashkarev, G. V., Khranovskyy, V. D., Baturin, V. A., Karpenko, O. Y., Lunika, M. M., Avramenko, K. A., Strelchuk, V. V., Thin Solid Films 2010, 518, 4529.CrossRefGoogle Scholar
Kalantar-Zadeh, K., Chen, Y. Y., Fry, B. N., Trinchi, A., Wlodarski, W., IEEE Ultrasonics Symp. 2001, 1, 353.Google Scholar
Morgan, D. P., Surface-wave devices for signal processing, Elsevier: New York, 1985.Google Scholar
Auld, B. A., Acoustic Fields and Waves in Solids, Vol. 2, Wiley: New York, 1973.Google Scholar