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Improved Kematical X-Ray Rocking Cjrve Analyses

Published online by Cambridge University Press:  22 February 2011

H. M. Kim and
C. R. Wie
H. M. Kim
Affiliation:
State University of New York at Buffalo, Dept. of Electrical and Computer Engineering, Bonner Hall, Amherst, NY 14260
C. R. Wie
Affiliation:
State University of New York at Buffalo, Dept. of Electrical and Computer Engineering, Bonner Hall, Amherst, NY 14260
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Abstract

A new boundary condition is used in the kinematical x-ray diffraction model analysis of rocking curves. The boundary condition is the dynamical reflection amplitude instead of the previously used dynamical intensity for the substrate. It is shown that this boundary condition properly accounts for the angular shift effect in the Bragg peak profile of very thin epitaxial layers and in the 0th-order superlattice peak. We present experimental and simulated rocking curves for various samples. The simulation was performed by using the dynamical diffraction theory, the kinematical model with the new amplitude boundary condition, and the kinematical model with the old intensity boundary condition. We also analyzed the strained resonant tunneling device structure and single strained quantum well samples by x-ray interference technique. Our x-ray interference results showed a good agreement with the nominal values for both experimental and simulated rocking curves.

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References

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