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Inducing Grain Alignment in Metals, Compounds and Multicomponent Thin Films

Published online by Cambridge University Press:  01 February 2011

James M.E. Harper
James M.E. Harper*
Affiliation:
james.harper@unh.edu, United States
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Abstract

Several methods to induce grain alignment in polycrystalline thin films are discussed, in which directional effects can dominate over the normal evolution of fiber texture during thin film growth. Early experiments with ion beam assisted deposition showed the importance of channeling directions in selecting grain orientations with low sputtering yield or low ion damage energy density. Examples of this approach include the formation of biaxial fiber textures in Nb, Al and AlN. Grain orientations may also be selected by the release of stored energy during abnormal grain growth initiated by solute precipitation (Cu-Co) or phase transformation (TiSi2). Other energy sources such as mechanical deformation, crystallization or compound formation may also contribute to producing desired grain alignments. In multicomponent thin films, combinations of these mechanisms provide opportunities for more specific control of grain orientations.

Keywords

ion-beam assisted depositiontexturethin film

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1150: Symposium RR – Artificially Induced Grain Alignment in Thin Films , 2008, 1150-RR01-01
Copyright
Copyright © Materials Research Society 2009

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References

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