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Interface Roughness Determined by Diffuse Scattering and by Reflectivity of Hard X-Rays

Published online by Cambridge University Press:  25 February 2011

B. Lengeler and
M. Hüppauff
B. Lengeler
Affiliation:
Institut für Schicht- und Ionentechnik, Forschungszentrum Jülich, 5170 Jülich
M. Hüppauff
Affiliation:
Institut für Festkörperforschung, Forschungszentrum Jülich, 5170 Jülich
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Abstract

X-ray reflectivity and diffuse scattering are powerful techniques for the non-destructive determination of the vertical and lateral roughness of external and internal interfaces. The influence of roughness on the reflected and transmitted amplitudes is treated in terms of a model first described by Névot and Croce. The diffuse scattering is described by an improved distorted wave Born approximation. A few examples will demonstrate the possibilities of the techniques.

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References

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