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Ion Beam Assisted Deposition

Published online by Cambridge University Press:  01 February 2011

James K. Hirvonen
James K. Hirvonen*
Affiliation:
AMSRD-ARL-WM-MA, US Army Research Laboratory, Aberdeen Proving Ground, MD 21005
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Abstract

The beneficial roles energetic ions play in thin film vacuum processes have long been recognized by the vacuum coating community. Optical coaters were among the first to adopt the process in the form of concurrent, low energy, directed ion beam bombardment of physical vapor deposition [electron beam] coatings for producing dense, adherent, robust, and environmentally resistant optical coatings. The international research and development community has also been actively pursuing the study of ion beam assisted deposition (IBAD) for both studying the mechanisms of ion/solid interactions during thin film growth as well as for developing coating protocols for specific application areas, including: tribological coatings, anti-corrosion coatings, optical coatings, superconducting buffer layers and coatings for temperature sensitive substrates such as polymers. This paper will review selected areas of this active field and will attempt to identify emerging application areas.

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