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Ir Electrodes for Ferroelectric Capacitors

Published online by Cambridge University Press:  10 February 2011

Sung Won Jung,
Ilhwan Bang,
Jaegab Lee and
Jiyoung Kim
Sung Won Jung
Affiliation:
Dept. of Metallurgical and Materials Eng., Kookmin University, Seoul, 136-702, Korea
Ilhwan Bang
Affiliation:
Dept. of Metallurgical and Materials Eng., Kookmin University, Seoul, 136-702, Korea
Jaegab Lee
Affiliation:
Dept. of Metallurgical and Materials Eng., Kookmin University, Seoul, 136-702, Korea
Jiyoung Kim
Affiliation:
Dept. of Metallurgical and Materials Eng., Kookmin University, Seoul, 136-702, Korea
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Abstract

In this study, Ir/IrO2 mixture electrodes are fabricated by furnace oxidation of sputter deposited Ir, IrO2 and their hybrid electrodes. The characteristics of furnace oxidation of various electrode stems with Ir family and their limitation are investigated. Annealing at higher than 700°C oxidation results in formation of undesirable extrusions in Ir electrode. When the Ir oxide facet extrusions are formed, Ir near at the extrusion is used up and SiO2 substrate are exposed. In addition, furnace oxidized Ir/Ti electrode is suggested as an alternative electrode, which shows smooth surface, good thermal stability, high oxygen contents and low resistivity.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997, 201
Copyright
Copyright © Materials Research Society 1998

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References

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