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Laser Diagnostics of Semiconductor Processing Systems

Published online by Cambridge University Press:  21 February 2011

Joda C. Wormhoudt,
Alan C. Stanton and
Joel A. Silver
Joel A. Silver
Affiliation:
Aerodyne Research, Inc., 45 Manning Road, Billerica MA 01821
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Abstract

Two processes of great importance in the semiconductor industry are vapor deposition and plasma etching. This paper presents a review of laser techniques for spectroscopic characterization of the gas phase species involved in these processes. Band strength and other spectroscopic data for selected molecules are used to give estimates of the detection sensitivity in vibrational and electronic bands. Preliminary results are given from work presently in progress in our laboratory on the detection of such species. The discussion includes examples of the application of these techniques to a number of laboratory deposition and etching devices.

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