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Metal Surface Morphology Characterization Using Laser Scatterometry*

Published online by Cambridge University Press:  25 February 2011

S. M. Gaspar,
K. C. Hickman,
J. R. McNeil,
R. D. Jacobson,
G. P. Lindauer,
Y. E. Strausser and
E. R. Krosche
S. M. Gaspar
Affiliation:
University of New Mexico, Albuquerque, NM 87131;
K. C. Hickman
Affiliation:
University of New Mexico, Albuquerque, NM 87131;
J. R. McNeil
Affiliation:
University of New Mexico, Albuquerque, NM 87131;
R. D. Jacobson
Affiliation:
Sandia Systems, Inc., Albuquerque, NM;
G. P. Lindauer
Affiliation:
Department of Materials Science, University of Florida, Gainesville, FL;
Y. E. Strausser
Affiliation:
Instruments, S. A., Inc., Santa Barbara, CA:
E. R. Krosche
Affiliation:
Intel Corporation, Albuquerque, NM.
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Abstract

We have applied angle-resolved laser scatterometry to characterize the morphology of metals deposited under various conditions. Scatterometry is a rapid, noncontact and nondestructive diagnostic which yields surface statistics including rms roughness and power spectral density of the microstructure.

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Footnotes

*

Work supported in part by SEMATECH.

References

REFERENCES

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