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Microfabricated Crevice Former with a Sensor Array

Published online by Cambridge University Press:  15 March 2011

Xiaoyan Wang,
Robert G. Kelly and
Michael L. Reed
Xiaoyan Wang
Affiliation:
Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904-4743, U.S.A.
Robert G. Kelly
Affiliation:
Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22904-4745, U.S.A.
Michael L. Reed
Affiliation:
Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904-4743, U.S.A.
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Abstract

Microfabrication of crevice corrosion samples is of importance in developing an accurate, comprehensive, and reliable crevice corrosion model, and real-time acquisition of corrosion information is also essential. Solid-state microsensor arrays have been used for detecting potential, pH, and ion concentrations, and their integration into crevice corrosion testing samples will provide real-time spatial information of crevice corrosion. The crevice corrosion testing sample is constructed by coupling a crevice former to a crevice substrate and has a uniform crevice gap. In this paper we present a crevice former incorporating a potentiometric, ion- selective membrane microelectrode pH sensor array. The crevice former is built on a silicon wafer using microelectromechanical systems (MEMS) fabrication and thin film semiconductor processing techniques, and consists of an array of five independent sensing microelectrodes. The array configuration allows for in-situ spatial pH analysis of crevice corrosion based on information from each sensor. The fabrication details of the crevice former with microelectrode sensor will be elaborated.

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References

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