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Micromachining for Terahertz Artificial Materials

Published online by Cambridge University Press:  01 February 2011

Andrew Gallant,
G. Peter Swift,
De Chang Dai,
Mikhail Kaliteevski,
Dagou A Zeze,
David Wood,
Michael C Petty,
Stuart Brand,
Richard A. Abram and
J. Martyn Chamberlain
Andrew Gallant
Affiliation:
a.j.gallant@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road., Durham, DH1 3LE, United Kingdom
G. Peter Swift
Affiliation:
G.P.Swift@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
De Chang Dai
Affiliation:
dechang.dai@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Mikhail Kaliteevski
Affiliation:
mikhail.kaliteevski@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Dagou A Zeze
Affiliation:
d.a.zeze@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
David Wood
Affiliation:
david.wood@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Michael C Petty
Affiliation:
m.c.petty@durham.ac.uk, Durham University, School of Engineering, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Stuart Brand
Affiliation:
stuart.brand@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
Richard A. Abram
Affiliation:
r.a.abram@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
J. Martyn Chamberlain
Affiliation:
martyn.chamberlain@durham.ac.uk, Durham University, Physics Department, Science Laboratories, Durham University, South Road, Durham, DH1 3LE, United Kingdom
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Abstract

In this paper we report on the development of micromachined filters for operation at terahertz frequencies. SU8, a negative photodefinable epoxy, is used to define arrays of high aspect ratio rods which are subsequently sputter coated in gold to form the filter. We fabricate and test a filter with a fixed period but variable diameter along the length of the array. By moving the array in the terahertz beam we demonstrate the ability to mechanically tune specific filter characteristics from a single device.

Keywords

microelectro-mechanical (MEMS)microstructureoptical properties

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References

1. Federici, J.F., Schulkin, B., Semicond. Sci. Technol., 20 (7), S266–S280 (2005)Google Scholar
2. Cho, G.C., Chen, H.-T., Kraatz, S., Karpowicz, N., Kersting, R., Semicon. Sci. Technol. 20 (7), S286–S292 (2005)Google Scholar
3. Planken, P.C.M., Rijmenam, C.E.W.M. van, Schouten, R.N., Semicond. Sci. Technol., 20, S121–S127 (2005)Google Scholar
4. Shew, B.Y., Li, H.C., Pan, C.L., Ko, C.H., J. Phys. D - Appl. Phys., 38 (7), 1097–1103 (2005)Google Scholar
5. Wu, D.M., Fang, N., Appl. Phys. Lett., 83(1), 201–203 (2003)Google Scholar
6. Gallant, A. J., Wood, D., Levitt, J. A., Kaliteevski, M., Petty, M. C., Brand, S., Abram, R. A. and Chamberlain, J. M., Proc. IET Seminar on Metamaterials for Microwave and (Sub) Millimetrewave Applications, London, 19 September, 117–120 (2006)Google Scholar
7. Gallant, A.J., Levitt, J.A., Kaliteevski, M., Wood, D., Petty, M.C., Abram, R.A., Brand, S., Swift, G.P., Zeze, D.A. and Chamberlain, J.M., Photonics West 2007, Proc SPIE 6472, 647206 (2007)Google Scholar