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Microwave Processing of Silicon Nitride

Published online by Cambridge University Press:  28 February 2011

T. N. Tiegs
Affiliation:
Metals and Ceramics Division, OakRidge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831–6069
J. O. Kiggans Jr.
Affiliation:
Metals and Ceramics Division, OakRidge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831–6069
H. D. Kimrey Jr.
Affiliation:
Metals and Ceramics Division, OakRidge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831–6069
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Abstract

Microwave sintering of Si3N4—based materials showed improved densification as compared to samples heated conventionally under similar conditions. Accelerated nitridation of Si in the microwave furnace to produce Si3N4 was also observed. Dense Si3N4, annealed by microwave heating, exhibited enhanced grain growth; however preferential coupling of the microwave power to the grain—boundary phases in the present experiments resulted in their degradation.

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Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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