Hostname: page-component-7b7567c8c-2n9c9 Total loading time: 0 Render date: 2026-11-14T00:03:01.449Z Has data issue: false hasContentIssue false

Monte Carlo Study of Etching at Silica-Water Interface

Published online by Cambridge University Press:  10 February 2011

Andrew Yen
Affiliation:
Department of Chemistry, The University of Michigan, Ann Arbor, MI 48109-1055, U.S.A.
Xiaolin Zhao
Affiliation:
Department of Chemistry, The University of Michigan, Ann Arbor, MI 48109-1055, U.S.A.
Raoul Kopelman
Affiliation:
Department of Chemistry, The University of Michigan, Ann Arbor, MI 48109-1055, U.S.A.
Get access

Abstract

A surface adsorption-diffusion-reaction model is proposed and tested by Monte Carlo simulations. The solvent shell effect is considered as a geometric constraint and the Langmuir adsorption mechanism is also incorporated. An anomalous power law of t1/2 is obtained for the amount of material removed from the surface vs. time. The result agrees well with etching experiments of SAM on a silica surface. We conclude that the unusual power law results from an interplay of vacancy growth and fusion at the surface.

Information

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable