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Morphology of Thin Films

Published online by Cambridge University Press:  21 February 2011

Pawel Keblinski
Affiliation:
Department of Physics and Center for Materials Physics, The Pennsylvania State University, 104 Davey Laboratory, University Park, PA 16802
Amos Maritan
Affiliation:
Dipartimento di Fisica, Universita di Padova, Via Marzolo 8, Padova 35131 Italy
Russell Messier
Affiliation:
Department of Engineering Science and Mechanics, 265 Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
Flavio Toigo
Affiliation:
Dipartimento di Fisica, Universita di Padova, Via Marzolo 8, Padova 35131 Italy
Jayanth R. Banavar
Affiliation:
Department of Physics and Center for Materials Physics, The Pennsylvania State University, 104 Davey Laboratory, University Park, PA 16802
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Abstract

We report the results of a combined experimental and theoretical study of thin film growth. The theoretical approach is able to capture nonlocal shadowing effects, allows for an arbitrary topology of the growing interface, provides information on the density in the film interior, incorporates surface tension in a natural manner and enables a unified study of diverse growth phenomena ranging from diffusion-limited aggregation to ballistic aggregation. The theoretical results are found to have many of the features observed in our experiments on physically vapor deposited films.

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