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Nanoscale Structure/Property Correlation Through Aberration-Corrected Stem And Theory

Published online by Cambridge University Press:  11 February 2011

S.J. Pennycook,
A. R. Lupini,
M. Varela,
A. Borisevich,
M. F. Chisholm,
E. Abe,
N. Dellby,
O.L. Krivanek,
P. D. Nellist and
L. G. Wang
...Show all authors
S.J. Pennycook
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TNDepartment of Physics and Astronomy, Vanderbilt University, Nashville, TN
A. R. Lupini
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN
M. Varela
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN
A. Borisevich
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN
M. F. Chisholm
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN
E. Abe
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TNNational Institute for Materials Science, 1–2–1 Sengen, Tsukuba, Japan
N. Dellby
Affiliation:
Nion Co., 1102 8th Street, Kirkland, WA
O.L. Krivanek
Affiliation:
Nion Co., 1102 8th Street, Kirkland, WA
P. D. Nellist
Affiliation:
Nion Co., 1102 8th Street, Kirkland, WA
L. G. Wang
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN
R. Buczko
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TNDepartment of Physics and Astronomy, Vanderbilt University, Nashville, TNInstitute of Physics, Polish Academy of Sciences, 02–668 Warsaw, Poland
X. Fan
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TN
S. T. Pantelides
Affiliation:
Condensed Matter Sciences Division, Oak Ridge National Laboratory, Oak Ridge, TNDepartment of Physics and Astronomy, Vanderbilt University, Nashville, TN
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The combination of atomic-resolution Z-contrast microscopy, electron energy loss spectroscopy and first-principles theory has proved to be a powerful means for structure property correlations at interfaces and nanostructures. The scanning transmission electron microscope (STEM) now routinely provides atomic-sized electron beams, allowing simultaneous Z-contrast imaging and EELS as shown in Fig. 1. The feasiblity of correcting the inherently large spherical aberration of microscope objective lenses promises to at least double the achievable resolution. The potential benefits for the STEM, however, may turn out to be much greater than those for the conventional TEM because it is very much less sensitive to chromatic instabilities. The 100 kV VG Microscopes HB501UX at Oak Ridge National Laboratory (ORNL) is now fitted with an aberration corrector constructed by Nion Co., which improved its resolution from 2.2 Å (full-width-half-maximum probe intensity) to around 1.3 Å. It is now very comparable in performance to the uncorrected 300 kV HB603U STEM at ORNL which, before correction, also had a directly interpretable resolution of 1.3 Å, although information transfer had been demonstrated down to 0.78 Å8. Initial results after installing an aberration corrector on the 300 kV STEM indicate a resolution of 0.84 Å. The theoretically achievable probe size in the absence of instabilities is predicted to be 0.5 Å.

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References

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