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Nonlinear Model Reduction Strategies for Rapid Thermal Processing Systems

Published online by Cambridge University Press:  10 February 2011

Suman Banerjee,
J. Vernon Cole,
Klavs F. Jensen and
A. Emami-Naeni
Suman Banerjee
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA
J. Vernon Cole
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA
Klavs F. Jensen
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA
A. Emami-Naeni
Affiliation:
Integrated Systems Inc., Santa Clara, CA
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Abstract

This paper presents a systematic way of developing low order nonlinear models from physically- based, large scale finite element models of rapid thermal processing (RTP) systems. The low order model is extracted from transient results of the finite element model using the proper orthogonal decomposition (POD) method. Eigenfunctions obtained from the POD method are used as basis functions in spectral Galerkin expansions of partial differential equations solved by the finite element model to generate the reduced models. Simulation results demonstrate good agreement with steady state and transient data generated from the finite element model.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 429: Symposium N – Rapid Thermal and Integrated Processing V , 1996, 57
Copyright
Copyright © Materials Research Society 1996

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References

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