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A Non-Reactive Excimer-Based Surface Preparation and Cleaning Tool for Broad-Based Industrial Applications

Published online by Cambridge University Press:  15 February 2011

E. C. Harvey,
J. Fletcher and
A. C. Engelsberg
E. C. Harvey
Affiliation:
Exitech Limited, Hanborough Business Park, Long Hanborough, Oxford 0X8 8LH, United Kingdom.
J. Fletcher
Affiliation:
Exitech Limited, Hanborough Business Park, Long Hanborough, Oxford 0X8 8LH, United Kingdom.
A. C. Engelsberg
Affiliation:
Radiance Services Company, 4405 East West Highway, Suite 512, Bethesda, MD 20814 USA
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Abstract

A surface-cleaning and preparation method that uses high-energy photons and a laminar flowing inert gas has been demonstrated as a feasible technology for broad-based industrial applications such as semiconductors, electronics, optics, coated optical and magnetic media, automotive, aerospace and art restoration. This technology is flexible in tool embodiment and is environmentally friendly because no water and chemicals are not used.

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References

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