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Optimization of Biosensing Microcantilever Devices

Published online by Cambridge University Press:  15 February 2011

Xuan Zhang,
Mo Yang and
Cengiz S. Ozkan
Xuan Zhang
Affiliation:
Mechanical Engineering Department, University of California, Riverside, CA 92521
Mo Yang
Affiliation:
Mechanical Engineering Department, University of California, Riverside, CA 92521
Cengiz S. Ozkan
Affiliation:
Mechanical Engineering Department, University of California, Riverside, CA 92521
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Abstract

Optimization of piezoresistive microcantilevers for biosensing applications has been studied using finite element analysis. Models have been described for predicting the static behavior of cantilevers with elastic and piezoresistive layers for analyte-receptor binding. The high-sensitivity cantilevers can be used to detect changes in surface stress due to the binding and hybridization of biomolecules. Chemo-mechanical binding forces have been analyzed to understand the issues of saturation over the cantilever surface. The introduction of stress concentration regions during cantilever fabrication has also been discussed which enhances the detection sensitivity through increased surface stress.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 773: Symposium N – Biomicroelectromechanical Systems (BioMEMS) , 2003, N6.1
Copyright
Copyright © Materials Research Society 2003

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