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Organic Insulating Films at Nanometer Scale

Published online by Cambridge University Press:  10 February 2011

D. Vuillaume
D. Vuillaume*
Affiliation:
Institut d'Electronique et de Micro-électronique du Nord, CNRS, and Dept. of Physics at ISEN, BP69, F-59650 cedex, Villeneuve d'Ascq, France, vuillaume@isen.iemn.univ-lillel.fr
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Abstract

We discuss the electrical and photo-electrical properties of monolayers of long hydrocarbon chains (alkyltrichlorosilane molecules) self-assembled on a silicon substrate. It is shown that these monolayers (<3 nm thick) act as high quality insulators : DC conductivity through the monolayers are in the 10-15 S/cm range, energy barrier heights at the silicon/monolayer interface are in the 45 eV range. Chemical surface modifications of these monolayers are reported in order to tailor their surface as well as electrical (dielectric constant) properties. Possible sub-01 μηι device applications are presented.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 446: Amorphous and Crystalline Insulating Thin Films–1996 , 1996, 79
Copyright
Copyright © Materials Research Society 1997

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