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The Origins of High Spatial Resolution Secondary Electron Microscopy

Published online by Cambridge University Press:  15 February 2011

M. R. Scheinfein,
J. S. Drucker,
J. Liu,
J. K. Weiss,
G. G. Hembree and
J. M. Cowley
M. R. Scheinfein
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ 85287-1504Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
J. S. Drucker
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
J. Liu
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
J. K. Weiss
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
G. G. Hembree
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ 85287-1504
J. M. Cowley
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ 85287-1504Center for Solid State Science, Arizona State University, Tempe, AZ 85287-1704
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Abstract

The secondary electron generation process is studied in an ultra-high vacuum scanning transmission electron microscope using electron coincidence spectroscopy. Production pathways for secondary electrons are determined by analyzing coincidences between secondary electrons and individual excitation events. The ultimate spatial resolution available in scanning electron microscopy is limited by the delocalization of the secondary electron generation process. This delocalization is studied using momentum resolved coincidence electron spectroscopy. The fraction of secondary electrons resulting from localized excitations can explain the high spatial resolution observed in secondary electron microscopy images.

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