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Photolithography: a New Tool for Ceramic Science

Published online by Cambridge University Press:  21 February 2011

Jürgen Rödel and
Andreas M. Glaeser
Jürgen Rödel
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899
Andreas M. Glaeser
Affiliation:
Department of Materials Science and Mineral Engineering, University of California, and Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, Berkeley, CA 94720
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Abstract

A recently developed technique combining photolithography, ion beam milling, and hot pressing allows the production of submicron-scale controlled-geometry, controlled-crystallography pore structures in controlled misorientation bicrystals, single crystal-polycrystal ensembles, and polycrystal-polycrystal ensembles. Such microdesigned interfacial structures provide a new tool for studying fundamental aspects of microstructural evolution. Current applications of the technique, opportunities for future research, and future extensions and refinements of the technique are described.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 155: Symposium L – Processing Science of Advanced Ceramics , 1989, 293
Copyright
Copyright © Materials Research Society 1989

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References

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