Published online by Cambridge University Press: 21 February 2011
We have fabricated acrylic based optical channel waveguides using proximityphotolithography as well as laser direct writing. The cladding layer is aphotosensitive aliphatic urethane dimethacrylate and the guiding layer is aphotosensitive aromatic acrylated epoxy. This material system provides goodadhesion to a variety of substrate materials. Since both the guiding andcladding layers are applied, these materials can be employed in severalelectrical/optical applications including multi-chip modules using Si, SiO2, and polyimide as well as high speed electronic boardtechnologies using teflon based substrates.
Loss measurements show a guide loss of less than 0.08 dB/cm for multi-modewaveguides fabricated using the direct write laser technique.Lithographically defined guides have a loss of 0.3 dB/cm for similar sizewaveguides.