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Plasma Immersion Surface Modification With Metal Ion Plasma

Published online by Cambridge University Press:  16 February 2011

I. G.,
X. Godechot and
K. M. Yu
I. G.
Affiliation:
Lawrence Berkeley Laboratory University of California erkeley, CA 94720
X. Godechot
Affiliation:
Lawrence Berkeley Laboratory University of California erkeley, CA 94720
K. M. Yu
Affiliation:
Lawrence Berkeley Laboratory University of California erkeley, CA 94720
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Abstract

We describe here a novel technique for surface modification in which a metal plasma is employed and by which various blends of plasma deposition and ion implantation can be obtained. The new technique is a variation of the plasma immersion technique described by Conrad and co-workers. When a substrate is immersed in a metal plasma, the plasma that condenses on the substrate remains there as a film, and when the substrate is then implanted, qualitatively different processes can follow, including ‘conventional’ high energy ion implantation, recoil implantation, ion beam mixing, ion beam assisted deposition, and metallic thin film and multilayer fabrication with or without species mixing. Multiple metal plasma guns can be used with different metal ion species, films can be bonded to the substrate through ion beam mixing at the interface, and multilayer structures can be tailored with graded or abrupt interfaces. We have fabricated several different kinds of modified surface layers in this way.

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References

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