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Polymer Multi-Layer Processing of Thin Film Materials

Published online by Cambridge University Press:  10 February 2011

T. A. Miller,
M. G. Mikhael,
R. Ellwanger,
A. Boufelfel,
D. Booth and
A. Yializis
T. A. Miller
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
M. G. Mikhael
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
R. Ellwanger
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
A. Boufelfel
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
D. Booth
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
A. Yializis
Affiliation:
Sigma Technologies International, Inc., 10960 N. Stallard Place, Tucson, AZ 85737
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Abstract

Polymer Multi-Layer (PML) processing is a high speed industrial scale process for depositing thin polymer films. Moving substrates of arbitrary width can have one micron (typ.) polymer films deposited at speeds measured in hundreds of meters per minute. A wide variety of chemical functionality available in the precursor materials allows a variety of chemical, electrical, and optical applications. The polymer characteristics can be further augmented by subsequent deposition of inorganic materials. Recent advances with dielectric, electrolytic, photonic, barrier, chemical affinity, energetic, and piezoelectric thin film polymer materials are discussed.

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References

1. Yializis, A., Shaw, D.G., Strycker, D.S., Ham, M., “High Speed Process for Coating Substrates” US Patent # 4,842,893 (1989).Google Scholar
2. Yializis, A., “Flash Evaporation of Monomer Fluids” US Patent # 4,954,371 (1990).Google Scholar
3. Miller, T. A., “New Processing, Materials, and Fundamental Structures for Piezoelectric Devices”, NASA Phase I SBIR Program, Contract Number: NAS1-20628, (1996).Google Scholar
4. Mikhael, M. G., “Novel Polymer Composites As Photoconductors”, NSF, SBIR Phase I Final Report, Award # 9760908, (1998).Google Scholar
5. Yializis, A. Mikhael, M. G., and Miller, T. A., Boufelfel, A., and Ellwanger, R. E., “Advances in Functionalized Acrylate Polymers for a New Variety of Web Coating Applications” Society of Vacuum Coaters, 411 ‘Annual Technical Conference Proceedings, 41,477, (1998).Google Scholar
6. Yializis, A., “A New Class of Highly Oriented Stable Polymer Materials for High Speed EO Waveguide Devices,” Final Report for Contract F33615-93-C-5373 (USAF Wright Laboratory) (1993).Google Scholar
7. Mikhael, M. G., Yializis, Angelo, and Miller, T. A.,“Polymer Electrolytes for Lithium Batteries”, ACS, Polymer Preprints, 39(1), 311 (1998).Google Scholar
8. Yializis, A. and Miller, T.A., “Electrostatic Supercapacitors”, Fifth International Seminar on Double Layer Capacitors and Similar Energy Storage Devices, Dec. 4–6, Boca Raton, FL.,(1995).Google Scholar
9. Yializis, A., Powers, G.L., Shaw, D.G., “A New High Temperature Multilayer Capacitor with Acrylate Dielectrics” IEEE Trans. on Components, Hybrids, and Manuf. Technology 13,611 (1990).Google Scholar
10. Miller, T.A., Yializis, A., Child, D., “High Dielectric Constant, Vacuum Deposited Polymers”, p 247, Low and High Dielectric Constant Materials: Materials Science, Processing and Reliability Issues, Rathmore, , Singh, , Thakur, , and Sun, , eds., The Electrochemical Society, Inc. publ., (1997).Google Scholar
11. Yializis, A., Ellwanger, R., Boufelfel, A., “Superior Polymer Webs via in situ Surface Functionalization, Society of Vacuum Coaters 39th Annual Technical Conference Proceedings, May 5–10, Philadelphia, PA, page384.Google Scholar