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Pressure Sensing with PVDF Gated AlGaN/GaN High Electron Mobility Transistor

Published online by Cambridge University Press:  31 January 2011

Sheng-Chun Hung,
Byung Hwan Chu,
Chih-Yang Chang,
Chien Fong Lo,
Ke Hung Chen,
S. J. Pearton,
Amir Dabiran,
P. P. Chow,
G. C. Chi and
F. Ren
Sheng-Chun Hung
Affiliation:
shengchunalice@gmail.com, University of Florida, Chemical Engineering, Gainesville, Florida, United States
Byung Hwan Chu
Affiliation:
bchu83@gmail.com
Chih-Yang Chang
Affiliation:
chang.chihyang@gmail.com, University of Florida, Chemical Engineering, Gainesville, Florida, United States
Chien Fong Lo
Affiliation:
clo@che.ufl.edu, University of Florida, Chemical Engineering, Gainesville, Florida, United States
Ke Hung Chen
Affiliation:
nimochen@ufl.edu, University of Florida, Chemical Engineering, Gainesville, Florida, United States
S. J. Pearton
Affiliation:
spear@mse.ufl.edu, Univ.Florida, Materials, Gainesville, Florida, United States
Amir Dabiran
Affiliation:
fren@che.ufl.edu, SVT Associates, Eden Prairie, Minnesota, United States
P. P. Chow
Affiliation:
bchu@che.ufl.edu, SVT Associates, Eden Prairie, Minnesota, United States
G. C. Chi
Affiliation:
bchu83@ufl.edu, National Central University, Jhong-Li, Taiwan, Province of China
F. Ren
Affiliation:
ren@che.ufl.edu, University of Florida, Chemical Engineering, Gainesville, Florida, United States
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Abstract

AlGaN/GaN high electron mobility transistors (HEMTs) with a polarized Polyvinylidene difluoride (PVDF) film coated on the gate area exhibited significant changes in channel conductance upon exposure to different ambient pressures. The PVDF thin film was deposited on the gate region with an inkjet plotter. Next, the PDVF film was polarized with an electrode located 2 mm above the PVDF film at a bias voltage of 10 kV and 70 °C. Variations in ambient pressure induced changes in the charge in the polarized PVDF, leading to a change of surface charges on the gate region of the HEMT. Changes in the gate charge were amplified through the modulation of the drain current in the HEMT. By reversing the polarity of the polarized PVDF film, the drain current dependence on the pressure could be reversed. Our results indicate that HEMTs have potential for use as pressure sensors.

Keywords

sensorpiezoelectricbiomedical

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