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Radiofrequency Discharge Modeling

Published online by Cambridge University Press:  21 February 2011

J. P Boeuf,
Ph Belenguer and
J. Wang
J. P Boeuf
Affiliation:
Centre de Physique Atomique de Toulouse, CNRS, URA 277, Univ. P. Sabatier, 118, route de Narbonne, 31062 Toulouse, Cédex, FRANCE
Ph Belenguer
Affiliation:
Centre de Physique Atomique de Toulouse, CNRS, URA 277, Univ. P. Sabatier, 118, route de Narbonne, 31062 Toulouse, Cédex, FRANCE
J. Wang
Affiliation:
Electrical Engineering Dept, Tsinghua University, Beijing, People's Republic of China
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Abstract

Selfconsistent fluid models of radiofrequency discharges in helium and silane are presented. The role of the sheath and plasma electric field in the electron energy gain and deposition mechanisms in both cases are discussed.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 165 , 1989, 17
Copyright
Copyright © Materials Research Society 1990

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