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Raman Microprobe Analysis of Laser-Induced Microstructures

Published online by Cambridge University Press:  26 February 2011

P. M. Fauchet
P. M. Fauchet*
Affiliation:
Department of Electrical Engineering Princeton University Princeton, NJ 08544
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Abstract

We study the composition, stress and structure variations across periodic surface undulations produced by pulsed laser illumination of semiconductors, by explosive crystallization of amorphous films, and by laser-assisted CVD. These variations are mapped out with a one micron spatial resolution using a Raman microprobe. Similarities and differences between the three cases are pointed out. These results are also compared to those obtained by deliberately exposing the sample to interfering beams.

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References

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