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Real-Time Studies of Interface Structural Dynamics

Published online by Cambridge University Press:  21 February 2011

Walter P. Lowe and
Roy Clarke
Walter P. Lowe
Affiliation:
AT&T Bell Laboratories, 600 Mountain Ave., Murray Hill, NJ 07974
Roy Clarke
Affiliation:
Randall Laboratory of Physics, University of Michigan, Ann Arbor, MI 48109
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Abstract

We present dynamic structural studies of thin films and their interface with underlying substrates using real-time x-ray diffraction. Using synchrotron light we have observed, in real-time, interface dynamics in semiconductor systems such as GexSi(i−x)/Si. The measurements show that under large temperature changes thin epitaxial layers may behave cooperatively to modify the overall strain profile. Dynamic behavior is exhibited in a series of discontinuities in the perpendicular lattice constant of the overlayer.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 237: Symposium Ca – Interface Dynamics and Growth , 1991, 367
Copyright
Copyright © Materials Research Society 1992

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References

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