Hostname: page-component-7b7567c8c-kwt9d Total loading time: 0 Render date: 2026-11-15T00:20:04.459Z Has data issue: false hasContentIssue false
  • English
  • Français

Reconstructed Structure of SiO2/Si(111) Interface

Published online by Cambridge University Press:  21 February 2011

Ichiro Hirosawa,
Jun'ichiro Nizuki,
Toru Tatsumi,
Koichi Akimoto and
Junji Matsui
Ichiro Hirosawa
Affiliation:
NEC Corporation 34 Miyukigaoka, Tsukuba, Ibaraki 305. Japan
Jun'ichiro Nizuki
Affiliation:
NEC Corporation 34 Miyukigaoka, Tsukuba, Ibaraki 305. Japan
Toru Tatsumi
Affiliation:
NEC Corporation 34 Miyukigaoka, Tsukuba, Ibaraki 305. Japan
Koichi Akimoto
Affiliation:
NEC Corporation 34 Miyukigaoka, Tsukuba, Ibaraki 305. Japan
Junji Matsui
Affiliation:
NEC Corporation 34 Miyukigaoka, Tsukuba, Ibaraki 305. Japan
Get access

Abstract

In order to investigate the initial oxidation process Qf the Si (111) surface, we have studied the molecular beam deposited Si0 2/Si(111)-7×7 interface structure using grazing incidence X-ray diffraction geometry. We suggest a three-fold symmetry structural model composed of stacking fault layer, dimer layer and additional ordered atoms. The three-fold symmetry structure comes from the preference for oxidation in the faulted half of the 7×7 structure.

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Tatsumi, T., Niino, T., Sakai, A., and Hirayama, H.. Thin Solid Films. 184 229 (1990).CrossRefGoogle Scholar
2. Hirosawa, I., Akimoto, K., Tatsumi, T., Mizuki, J. and Matsui, J.. J.Cryst. Growth. 103 150 (1990).CrossRefGoogle Scholar
3. Takayanagi, K., Tanishiro, Y., Takahashi, S. and Takahashi, M.. Surface Sci. 164 367 (1985).CrossRefGoogle Scholar
4. Robinson, I. K., Waskiewcz, W. K., Tung, R. T. and Bohr, J.. Phys. Rev. Lett. 51 2714 (1986).CrossRefGoogle Scholar
5. Pelz, J. P. and Koch, H.. Phys. Rev. B42 3761 (1990).CrossRefGoogle Scholar