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Reflection Electron Microscopy and Diffraction from Crystal Surfaces

Published online by Cambridge University Press:  21 February 2011

J.M. Cowley
J.M. Cowley*
Affiliation:
Department of Physics, Arizona State University Tempe, Arizona 85287, USA
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Abstract

The recent revival of techniques for the imaging of crystal surfaces, using electrons forward-scattered in the RHEED mode and employing modern electron microscopes, has lead to the introduction of valuable new methods for the study of surface structure. Either fixed beam or scanning transmission electron microscopy (STEM) instruments may be used and in each case a lateral resolution of 10Å or better is possible. Simple theoretical treatments suggest that the contrast from surface steps may be attributed to a combination of phase-contrast, diffraction contrast and geometric effects. With a STEM instrument the image information can be combined with information on the local composition and crystal structure by use of microanalysis and microdiffraction techniques. Examples of applications include studies of the surface structure of metals, semiconductors and oxides, and the surface reactions.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 31: Symposium N – Electron Microscopy of Materials , 1983 , 177
Copyright
Copyright © Materials Research Society 2006

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References

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