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Role of Hydrogen Microstructure in Amorphous Silicon

Published online by Cambridge University Press:  21 February 2011

Sufi Zafar and
E. A. Schiff
Sufi Zafar
Affiliation:
The James Franck Institute, The University of Chicago, Chicago IL 60637
E. A. Schiff
Affiliation:
Dept. of Physics, Syracuse University, Syracuse NY 13244
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Abstract

A model for correlating the observed properties of hydrogenated amorphous silicon (a-Si:H) with the underlying hydrogen microstructure is reviewed. The model provides a unified description of defect equilibration, hydrogen evolution, rehydrogenation and hydrogen diffusion measurements.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 258: Symposium A – Amorphous Silicon Technology – 1992 , 1992, 199
Copyright
Copyright © Materials Research Society 1992

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References

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