Hostname: page-component-7b7567c8c-wxvwp Total loading time: 0 Render date: 2026-11-14T00:23:23.077Z Has data issue: false hasContentIssue false
  • English
  • Français

Self-assembled PS-PMMA nanodot array pattern arranged in a parallelogram guide

Published online by Cambridge University Press:  26 February 2011

Kaori Kimura and
Masatoshi Sakurai
Kaori Kimura
Affiliation:
kaori.kimura@toshiba.co.jp, Toshiba Corporation, Corporate Research and Development Center, 1, Komukai Toshiba-cho, Saiwai-ku, Kawasaki, Kanagawa, 212-8582, Japan, +81-44-549-2381, +81-44-520-1802
Masatoshi Sakurai
Affiliation:
masatoshi.sakurai@toshiba.co.jp, Toshiba Corporation, Corporate Research and Development Center, Japan
Get access

Abstract

Mask patterns for XY-type magnetic patterned media using phase separation of polystyrene-polymethylmethacrylate (PS-PMMA) block copolymer were fabricated. Parallelogram guides molded by the nanoimprint lithography controlled the PS-PMMA self-assembling pattern that formed in the guide area. 45nm-pitch defect-free PS-PMMA dot patterns were obtained within a 1μm × 1μm area by optimizing the PS-PMMA film thickness.

Keywords

self-assemblypolymerfilm

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1 Chou, S. Y., Wei, M. S., Krauss, P. R., and Fischer, P. B., J. Appl. Phys., 76, 6673, (1994).Google Scholar
2 White, R. L. R., New, M. H., and Pease, F. W. R., IEEE Trans. Magn., 33, 990, (1997).Google Scholar
3 Ross, C. A., Smith, H. I., Savas, T., Schattenburg, M., Farhoud, M., Hwang, M., Walsh, M., Abraham, M. C., and Ram, R.J., J. Vac. Sci. Technol. B, 17, 3168, (1999).Google Scholar
4 Rattner, C. T., Best, M. E., and Terris, B. D., IEEE Trans. Magn., 37, 1649, (2001).Google Scholar
5 Zangari, G. and Lambeth, D. N., IEEE Trans. Magn., 33, 3010, (1997).Google Scholar
6 Li, S. P., Lew, W. S., Xu, Y. B., Hirohata, A., Samad, A., Baker, F., and Bland, J. A. C., Appl. Phys. Lett., 76, 748, (2000).Google Scholar
7 Park, M., Harrison, C., Chaikin, P. M., Register, R. A., and Anderson, D. H., Science, 276, 1401, (1997).Google Scholar
8 Bal, M., Ursache, A., Tuominen, M., Goldbach, J. T., and Russel, T. P., Appl. Phys. Lett., 81, 3479, (2002).Google Scholar
9 Naito, K., Hieda, H., Sakurai, M., Kamata, Y., and Asawkawa, K., IEEE Trans. Magn., 58, 1949, (2002).Google Scholar
10 Kikitsu, A., Kamata, Y., Hieda, H., Sakurai, M., Aasakawa, K., and Naito, K., Trans. Magn. Soc. Japan, 4, 1, (2004).Google Scholar
11 Cheng, J. Y., Jung, W., and Ross, C. A., Phys. Rev. B, 70, 064417, (2004).Google Scholar
12 Chou, S. Y., Krauss, P. R., and Renstorm, P. J., J. Vac. Sci. Technol. B, 14, 4129, (1996).Google Scholar
13 Sakurai, M., 2003 Third IEEE Conference on Nanotechnology, 2, 596, (2003).Google Scholar
14 Sakurai, M., Proc. of International Symposium on Ultra-High Density Spinic Storage Systems, 141, (2003).Google Scholar