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Shape Memory and Magnetostrictive Materials for Mems

Published online by Cambridge University Press:  10 February 2011

Manfred Wuttig,
Eckhard Quandt,
Alfred Ludwig and
Bernhard Winzek
Manfred Wuttig
Affiliation:
Department of Materials and Nuclear Engineering, University of Maryland, College Park, MD 20742-2115, USA
Eckhard Quandt
Affiliation:
Institut für Materialforschung I, Forschungszentrum Karlsruhe, D-76021 Karlsruhe, GERMANY
Alfred Ludwig
Affiliation:
Institut für Materialforschung I, Forschungszentrum Karlsruhe, D-76021 Karlsruhe, GERMANY
Bernhard Winzek
Affiliation:
Institut für Materialforschung I, Forschungszentrum Karlsruhe, D-76021 Karlsruhe, GERMANY
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Abstract

Ferroic materials are ideally suited for actuators in MEMS applications. Ferro- elastic materials, i.e. shape memory alloys (SMAs), produce a significant, o. o. 104 microstrain, phase transformation induced thermoelastic eigenstrain. Rare earth based ferromagnetic materials possess large, o.o. 103 microstrain, saturation magnetostriction which can be developed at fields of the order of mT readily achieved in MEMS geometries. This paper discusses the essentials of the thermoelastic stress evolution in SMA/Substrate bimorphs and of the development of rare earth based ferromagnetic multilayers. SMA actuationunder the constraint of a substrate and the optimization of the multilayers are emphazized.

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