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SOI Technologies: Device Applications and FutureProspects

Published online by Cambridge University Press:  25 February 2011

B-Y. Tsaur
B-Y. Tsaur*
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173-0073
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Abstract

Silicon-on-insulator (SOI) technologies have four major applications:very-large-scale integrated circuits (ICs), high-voltage ICs, large-areaICs, and vertical ICs. This paper will review the recent progress made inthese areas and discuss the prospects of various SOI technologies forachieving commercialization.

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References

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