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Spatial and Temporal Analysis of Microplasma Light Emission

Published online by Cambridge University Press:  21 May 2012

M. Blajan,
H. Fukunaga and
K. Shimizu
M. Blajan
Affiliation:
Innovation and Joint Research Center, Shizuoka University, 3-5-1 Jyohoku, Nakaku, 432-8561 Hamamatsu, Japan
H. Fukunaga
Affiliation:
Innovation and Joint Research Center, Shizuoka University, 3-5-1 Jyohoku, Nakaku, 432-8561 Hamamatsu, Japan
K. Shimizu
Affiliation:
Innovation and Joint Research Center, Shizuoka University, 3-5-1 Jyohoku, Nakaku, 432-8561 Hamamatsu, Japan
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Abstract

Emission spectroscopy analysis was used to study the microplasma phenomena. The microplasma discharge in Ar, N2/Ar and O2/Ar was analyzed in the discharge gap area and spatial distribution of active species was measured also outside the electrodes. Spatial and temporal distribution showed the propagation of light emission from anode towards cathode within a time period of 190 ns. The measurement of OH peak at 308.9 nm proved the existence of this excited species 1 mm outside the electrodes area.

Keywords

polymerplasma depositiondielectric

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1469: Symposium WW – Plasma Processing and Diagnostics for Life Sciences , 2012, mrss12-1469-ww06-07
Copyright
Copyright © Materials Research Society 2012

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References

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